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POU-05-NS GasShield® Point of Use Filters
Part Number: 6800052, 6800070 Nickel Filter Media and 316L stainless steel Housing point of use filter for flow range up […]
POU-05-S GasShield® Point of Use Filters
Part Number: 6800017, 6800059 Stainless Steel Filter Media and Housing point of use filter for flow ranges up to 10 […]
POU-10-H GasShield® Point of Use Filters
Part Number: 6800004, 6800178 Alloy 22 Filter Media and Housing point of use filter for flow ranges 60-150 SLPM, OAL […]
POU-10-HS GasShield® Point of Use Filters
Part Number: 6800046, 6800181 Alloy 22 Filter Media and 316L stainless steel Housing point of use filter for flow ranges […]
POU-10-S GasShield® Point of Use Filters
Part Number: 6800003, 6800007, 6800011, 6800073 Stainless Steel Filter Media and Housing point of use filter for flow ranges 60-150 […]
POU-3-H GasShield® Point of Use Filters
Part Number: 6800002, 6800148 Alloy 22 Filter Media and Housing point of use filter for flow ranges 30-60 SLPM, OAL […]
POU-3-HS GasShield® Point of Use Filters
Part Number: 6800045, 6800180 Stainless Steel Housing and Alloy 22 Filter Media point of use filter for flow ranges 30-60 […]
POU-3-NS GasShield® Point of Use Filters
Part Number: 6800067 Nickel Filter Media and 316L stainless steel Housing point of use filter for flow ranges 30-60 SLPM, […]
POU-3-S GasShield® Point of Use Filters
Part Number: 6800001, 6800079 Stainless Steel Filter Media and Housing point of use filter for flow ranges 30-60 SLPM, OAL […]
POU-30-S GasShield® Point of Use Filters
Part Number: 6800074, 6800140 Stainless Steel Filter Media and Housing point of use filter for flow ranges 200-300 SLPM, OAL […]
Sentry Series Penta® Nickel POU Gas Filters
Part Number: 6815001, 6815004, 6805005 Penta® Nickel Filter Media and 316L Stainless Steel Hardware
A Low Pressure Drop Sintered Metal Filter for Ultra-High Purity Gas Systems
Whitepaper on all-metal filter with improved performance over other POU gas filters used in semiconductor fabrication.
Weld Gas Purge Jumper Particle Filters
SEMI Standards for welding and weld gas purge jumper particle filters. Using a fiber metal filter provides the fastest and […]
POU-05-H GasShield® Point of Use Gas Filters
Part Number: 6800040 Alloy 22 Filter Media and Housing Hardware point of use filter for flow ranges up to 10 […]
BGF315H GasShield® Penta® Bulk Gas Filter
Part Number: 6825164 Penta® Nickel Filter Media and 316L stainless steel Housing bulk gas filter for flow ranges up to […]
DEF315H GasShield® Defender High Flow Gas Filters
Part Number: 6712201, 6712211 316L Stainless Steel Fiber Filter Media and 316L stainless steel Housing point of use filter for […]
DEF4000 GasShield® Defender High Flow Gas Filters
Part Number: 6712501 316L Stainless Steel Fiber Filter Media and 316L stainless steel Housing point of use filter for flow […]
Enabling UHP Gas Filtration for Advanced Materials in Semiconductor Manufacturing
Technical White Paper on Ultra-Compact Filtration for Corrosive Precursors and UHP Demands in ALD and CVD Processes
