GasShield® HiFlow™ Sandwich Filter
Ultra-Compact, High-Purity Filtration for ALD and Advanced Materials Processes
The GasShield® HiFlow™ Sandwich Filter is the first-ever point-of-use metal fiber filter engineered for ultra-high purity (UHP) gas delivery in cutting-edge semiconductor fabrication. Its compact, patent-pending design handles the extreme demands of Atomic Layer Deposition (ALD) and More-than-Moore architectures – delivering breakthrough flow performance without compromising particle retention or reliability.
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Why Switch to the GasShield® HiFlow™ Sandwich Filter?
- Pressure Drop vs. Throughput: Traditional filters restrict flow — Mott’s design delivers 25% lower pressure drop, improving throughput without sacrificing performance.
- Particle Capture vs. Placement: Most filters miss particles where it counts — Mott provides >9 LRV retention down to 1.5nm right at the chamber, minimizing defects.
- Performance vs. Footprint: High-performance filters are often too bulky — Mott’s compact sandwich-style design fits in tight spaces without compromise.
GasShield® HiFlow™ Sandwich Filter Cut Sheet | Mott Corporation
Download the cut sheet for Mott’s GasShield® HiFlow™ Sandwich Filter—compact design, >9 LRV at 1.5nm, and low pressure drop for ALD and UHP gas delivery.
High Purity Surface Mount Flow Restrictors
The Mott GSMR Series flow restrictors support the 1.125” high-flow C-Seal configuration gas systems.
Product Specs
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| Product Features |
>9 LRV Filtration Efficiency Ultra-Compact Design Lower Pressure Drop All-Metal Construction Exceptional Thermal Stability |
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| Applications |
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| Performance Specifications |
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| Ordering Information |
W-Seal and custom fittings available upon request. |
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| Ready to Test It in Your Tool? |
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FAQs
Q. What makes the GasShield® HiFlow™ Sandwich Filter different from other UHP filters?
It’s the industry’s first point-of-use metal fiber filter in a compact sandwich design. With a low-pressure drop, zero media migration, and unmatched filtration efficiency, it’s optimized for high-demand processes like ALD and More-than-Moore device nodes.
Q. What particle size does it retain?
The GasShield® HiFlow™ Sandwich Filter retains particles down to 0.0015 µm (1.5 nanometers).
It features Mott’s proprietary all-metal porous media, delivering exceptional sub-micron particle capture without sacrificing flow rate—perfect for the precision required in ALD and advanced semiconductor processes.
Q. Is it compatible with corrosive or reactive gases?
Yes. The filter’s all-metal construction (316L stainless steel or nickel options) ensures compatibility with a wide range of ultra-high purity process gases, including reactive and corrosive gases used in advanced semiconductor manufacturing.
Q. What is the pressure rating and temperature tolerance?
The GasShield® HiFlow™ Sandwich Filter is engineered for high-performance applications with the following specifications:
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Maximum Operating Pressure:
750 psig (51.7 barg) -
Maximum Operating Temperature for Inert Gas: 460°
- Maximum Differential Pressure: 1000 psid (68.9 bar)
These ratings ensure the filter’s reliability and efficiency in ultra-high purity gas delivery systems, even under demanding conditions.
Q. How do I know what filter size or configuration I need?
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