Mott Corporation Unveils GasShield HiFlow Sandwich Filter
Mott Corporation has introduced the GasShield HiFlow Sandwich Filter, engineered to meet the rigorous demands of next-generation semiconductor fabrication. As the industry advances beyond Moore’s Law, materials like molybdenum (Mo) are becoming essential due to their superior properties over traditional tungsten, such as lower resistivity and enhanced electromigration resistance.
The integration of molybdenum necessitates Atomic Layer Deposition (ALD), which requires specialized filtration solutions to ensure process stability. Mott’s GasShield HiFlow Sandwich Filter addresses this need by offering:
- High Particle Retention: Over 9 LRV at 1.5 nm per SEMI F38-0720.
- All-Metal Construction: Eliminates shedding and outgassing.
- Exceptional Corrosion Resistance: Available with Alloy C-22 for halogenated precursors.
- High-Temperature Stability: Up to 460°C.
- Superior Flow Efficiency: 25–35% lower pressure drop compared to traditional disc filters.
- Ultra-High Purity: Moisture levels below 10 ppb and hydrocarbons beneath detection limits.
- Compact Design: Dimensions of 1.12″ x 1.12″ x 0.49″, facilitating integration into tight tool layouts and high-temperature environments.
Additionally, the filter ensures stable flow rates (≤2% part-to-part variation) and comes with a five-year reliability guarantee under standard use conditions. Its plug-and-play installation supports both C-seal and custom W-seal options.
Paul Hofemann, Semiconductor Technical Expert at Mott, stated, “The GasShield HiFlow Sandwich Filter is a critical enabler of More-than-Moore fabrication, ensuring higher yields, cleaner processes, and more reliable performance in ALD-based molybdenum deposition.”
