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A
forward-thinking partner, positioned
for the next challenge in ultra-pure filtration.
But
before getting into products, let's talk about possibilities.
Seems
like a strange way to begin. Especially when there's so much
to say about Mott porous metal filters and flow restrictors.
But identifying the goal first, and then either choosing or
devising the best possible solution is how our High
Purity product family began, and how it continues to grow.
What are your biggest needs? Is there a recurring challenge
somewhere? While Mott porous metal can't solve all the problems
within a fab, it can do a lot more than people realize
often better than any other media, and sometimes replace altogether
different technologies. And it all stems from Mott's exceptional
research, development and manufacturing
capabilities.
Making strides in, and beyond, high-purity filtration.
Semiconductor
manufacturers are discovering many uses for Mott
porous metal outside of the gas line. Current uses
either in production or at some stage of development
include:
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CMP (solid and liquid)
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Vacuum platens
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Heat transfer
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Media retention
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Wafer transport
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Gas and liquid dispersion
What makes Mott porous metal media the media of choice.
When
it comes to strength, precision, efficiency and longevity,
no filter media works more reliably than Mott porous metal
media. This unique substance makes Mott filters highly efficient
and virtually indestructible, offering semiconductor manufacturers
a whole new level of comfort, coupled with the tremendous
savings of eliminating annual change-outs. For years, users
of alternative high-purity filtration media have switched
over to Mott filters for the distinct advantages they provide.
The
product line.
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In-line point-of-use filters
GasShield point-of-use filters are available in over
20 standard designs, constructed of 316L stainless steel,
nickel, or Hastelloy C-22, and rated for flows up to 600
slpm and inlet pressures as high as 5000 psig.
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IGS filters Mott offers a full
line of filter and flow restrictor products in designs compatible
with the gas system interfaces presently gaining acceptance
in process tools, gas cabinets and valve manifold box installations.
Our IGS filters are designed to provide greater system flexibility
coupled with ease of change-out and reduced leadtimes. Filters
are offered in 316L SS, nickel and Hastelloy C-22 for gas
compatibility and range in flow rates from 10 to 100 liters
per minute.
- Diffusers – Mott GasShield® Diffusers
are designed to maximize required
flow while minimizing pressure
drop, resulting in a uniform
diffusion of gas that will
not disturb particles in the
chamber. Some Mott diffusers
also offer exceptional filtration
by providing up to 9LRV (99.9999999%)
reduction in particles down
to 0.003µm. This combination
of uniform flow and filtration
make Mott GasShield Diffusers
the superior product of choice.
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The high-flow metal alternative
When high flow is a high priority, Mott offers the
ideal solution GasShield PENTA® point-of-use
filters. PENTA filter elements are constructed from Mott's
unique high-flow nickel media that combines true 9-log filtration
with a high flow and low delta-P in compact housings
as small as 3.31" long. PENTA filters offer the key benefits
of Teflon® with the strength, long life and assurance
that comes only from Mott.
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Bulk and utility filters
Like their point-of-use counterparts, GasShield bulk
and utility filters are made to last, offering reliable
main-line filtration for years. Designed to accommodate
flows from 1000 slpm to 25,000 slpm, GasShield bulk filters
are available with 316L stainless steel or nickel filter
elements. Additional bulk designs can be provided for applications
involving higher pressures or highly corrosive gases.
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Specialty solutions The
GasShield filter line also includes products designed for
highly specific purposes or positions in the gas line
such as the compact all-nickel GasketFilter that fits inside
a 1/4" face seal fitting. And the POU Diffuser which reduces
the velocity of purge gas to ensure a uniform and laminar
flow of gas into the contaminated environment.
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Flow restrictors Mott
also offers High Purity Flow Restrictors, in which porous
metal filter elements are designed into double-male face
seal fittings to provide consistent, long-lasting, wear-
and plug-resistant flow control with a minimal footprint
to conserve space.
Reliability,
with room to spare
Tests have shown that it would take a constant flow of 300,608
particles per liter at 10 slpm to reach full GasShield capacity
in five years. Yet in the field, an actual contamination level
in a very unclean system might be 10 particles per cubic ft.,
or 0.353 particles per liter equating to a tremendous
level of protection, even with years of continuous use.
| GasShield
Particle Capacity Test |
| Filter
Tested: |
GasShield
POU-05-SV1 |
| Flow
Rate: |
10
slpm |
| Filter
Area: |
2.2
in.2 |
| Total
particle challenge: |
3.6
x 1012 particles/in.2 (7.9 x 1012 particles) |
| Downstream
particles: |
0
|
| Pressure
drop increase: |
1.38
psid |
| Particles
required to reach challenge capacity, running
at 10 slpm, 24 hours/ day, for 5 years: |
300,608
particles/liter |
| Particles
normally encountered in 5 years: |
<
0.353 particles/liter |
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