Point-of-use
IGS
High-flow
Bulk/utility
Flow restrictors
GasketFilter
Diffusers
 

A forward-thinking partner, positioned
for the next challenge in ultra-pure filtration.

But before getting into products, let's talk about possibilities.
Seems like a strange way to begin. Especially when there's so much to say about Mott porous metal filters and flow restrictors. But identifying the goal first, and then either choosing or devising the best possible solution is how our High Purity product family began, and how it continues to grow.

What are your biggest needs? Is there a recurring challenge somewhere? While Mott porous metal can't solve all the problems within a fab, it can do a lot more than people realize – often better than any other media, and sometimes replace altogether different technologies. And it all stems from Mott's exceptional research, development and manufacturing capabilities.

Making strides in, and beyond, high-purity filtration.
Semiconductor manufacturers are discovering many uses for Mott porous metal outside of the gas line. Current uses – either in production or at some stage of development – include:

  • CMP (solid and liquid)
  • Vacuum platens
  • Heat transfer
  • Media retention
  • Wafer transport
  • Gas and liquid dispersion

What makes Mott porous metal media the media of choice.
When it comes to strength, precision, efficiency and longevity, no filter media works more reliably than Mott porous metal media. This unique substance makes Mott filters highly efficient and virtually indestructible, offering semiconductor manufacturers a whole new level of comfort, coupled with the tremendous savings of eliminating annual change-outs. For years, users of alternative high-purity filtration media have switched over to Mott filters for the distinct advantages they provide.

The product line.

  • In-line point-of-use filters – GasShield point-of-use filters are available in over 20 standard designs, constructed of 316L stainless steel, nickel, or Hastelloy C-22, and rated for flows up to 600 slpm and inlet pressures as high as 5000 psig.

  • IGS filters – Mott offers a full line of filter and flow restrictor products in designs compatible with the gas system interfaces presently gaining acceptance in process tools, gas cabinets and valve manifold box installations. Our IGS filters are designed to provide greater system flexibility coupled with ease of change-out and reduced leadtimes. Filters are offered in 316L SS, nickel and Hastelloy C-22 for gas compatibility and range in flow rates from 10 to 100 liters per minute.

  • Diffusers – Mott GasShield® Diffusers are designed to maximize required flow while minimizing pressure drop, resulting in a uniform diffusion of gas that will not disturb particles in the chamber. Some Mott diffusers also offer exceptional filtration by providing up to 9LRV (99.9999999%) reduction in particles down to 0.003µm. This combination of uniform flow and filtration make Mott GasShield Diffusers the superior product of choice.

  • The high-flow metal alternative – When high flow is a high priority, Mott offers the ideal solution – GasShield PENTA® point-of-use filters. PENTA filter elements are constructed from Mott's unique high-flow nickel media that combines true 9-log filtration with a high flow and low delta-P – in compact housings as small as 3.31" long. PENTA filters offer the key benefits of Teflon® with the strength, long life and assurance that comes only from Mott.

  • Bulk and utility filters – Like their point-of-use counterparts, GasShield bulk and utility filters are made to last, offering reliable main-line filtration for years. Designed to accommodate flows from 1000 slpm to 25,000 slpm, GasShield bulk filters are available with 316L stainless steel or nickel filter elements. Additional bulk designs can be provided for applications involving higher pressures or highly corrosive gases.

  • Specialty solutions – The GasShield filter line also includes products designed for highly specific purposes or positions in the gas line – such as the compact all-nickel GasketFilter that fits inside a 1/4" face seal fitting. And the POU Diffuser which reduces the velocity of purge gas to ensure a uniform and laminar flow of gas into the contaminated environment.

  • Flow restrictors – Mott also offers High Purity Flow Restrictors, in which porous metal filter elements are designed into double-male face seal fittings to provide consistent, long-lasting, wear- and plug-resistant flow control – with a minimal footprint to conserve space.

Reliability, with room to spare
Tests have shown that it would take a constant flow of 300,608 particles per liter at 10 slpm to reach full GasShield capacity in five years. Yet in the field, an actual contamination level in a very unclean system might be 10 particles per cubic ft., or 0.353 particles per liter – equating to a tremendous level of protection, even with years of continuous use.

GasShield Particle Capacity Test
Filter Tested: GasShield POU-05-SV1
Flow Rate: 10 slpm
Filter Area: 2.2 in.2
Total particle challenge: 3.6 x 1012 particles/in.2 (7.9 x 1012 particles)
Downstream particles: 0
Pressure drop increase: 1.38 psid
Particles required to reach challenge capacity, running at 10 slpm, 24 hours/ day, for 5 years: 300,608 particles/liter
Particles normally encountered in 5 years: < 0.353 particles/liter


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